[21a-136-1~12] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

[21a-136-11] Study on particle removal on microplasma electrode surface

〇Daisuke Nonaka¹, Marius Blajan¹, Jaroslav Kristof¹, Hitoki Yoneda², Kazuo Shimizu¹ (1.Shizuoka Univ., 2.UEC)

Keywords:microplasma, particle removal, plasma actuator

In recent years, fine particulate matter (PM 2.5) exerts an adverse effect on air pollution and the human body, so it is considered to be a problem. The problem with fine particles is not only the fine particles floating in the atmosphere. There are also many fine particles which cause problems by depositing on the surface of substances, such as causing deterioration of products due to deposition of fine particles on wafers in the semiconductor industry. Therefore, in this research, for the purpose of removing fine particles adhering to the surface of the material, experimental examination of the removal of fine particles on the surface of the microplasma electrode was carried out.