[21a-141-1~13] 15.6 Group IV Compound Semiconductors (SiC)

[21a-141-10] Influence of proton beam writing on optical properties of silicon vacancy introduced in SiC pn junction diodes

〇Yuichi Yamazaki¹, Yoji Chiba^1,2, Takahiro Makino¹, Shin-ichiro Sato¹, Naoto Yamada¹, Takahiro Satoh¹, Yasuto Hijikata², Kazutoshi Kojima³, Sang-Yun Lee⁴, Takeshi Ohshima¹ (1.QST, 2.Saitama Univ., 3.AIST, 4.KIST)

Keywords:SiC, Color center, Optical property