[21a-212A-1~10] 3.9 Terahertz technologies

[21a-212A-10] Antenna-Coupled Terahertz Microbolometers with Meander Structures of Titanium and Platinum Thermistors

〇Norihisa Hiromoto¹, Amit Banerjee², Elamaran Durgadevi², Hiroaki Satoh², Dai Itoh¹, Makoto Aoki³, Catur Apriono⁴, Eko Tjipto Rahardjo⁴, Erik Bruendermann⁵, Hiroshi Inokawa⁶ (1.Shizuoka Univ.-GSiST, 2.Shizuoka Univ.-RIE, 3.NICT, 4.Indonesia Univ., 5.KIT, 6.Shizuoka Univ.-GSST)

Keywords:terahertz (THz) detector, meander structure, antenna-coupled bolometer

Development of room-temperature terahertz (THz) detectors with high detectivity is especially important in wide fields of applications to industry, medicine, security and so on. We have studied antenna-coupled THz microbolometers with meander metal-lines of thermistors for this purpose. The noise-equivalent power (NEP) of the antenna-coupled microbolometer with a meander thermistor of titanium (Ti) is measured by using a 1 THz radiation source, which is much more improved than the previous studies. The THz responsivity is consistent with the electromagnetic simulation and results of electric measurement, showing the reliability in this study.