[21a-212B-1~11] 11.5 Junction and circuit fabrication process, digital applications

△ [21a-212B-9] Fabrication of ferromagnetic Josephson junctions on Si substrate with TiN buffer for superconducting qubit

〇Haruki Kato¹, Tomohiro Kamiya¹, Sunmi Kim², Qiu Wei², Akira Kawakami², Hirotaka Terai², Koichi Semba², Taro Yamashita^1,3, Akira Fujimaki¹ (1.Nagoya Univ., 2.NICT, 3.JST-PRESTO)

Keywords:superconducting qubit, ferromagnetic Josephson junction