The 79th JSAP Autumn Meeting, 2018

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6 Thin Films and Surfaces » 6.3 Oxide electronics

[21a-222-1~11] 6.3 Oxide electronics

Fri. Sep 21, 2018 9:00 AM - 12:00 PM 222 (222)

Hideyuki Okumura(Kyoto Univ.), Hiroshi Sakama(Sophia Univ.)

11:30 AM - 11:45 AM

[21a-222-10] Properties of sputtered Sn-O films using metal target

〇Takuya Yamada1, Toma Hikosaka1, Shinji Takayanagi1, Mitsuhiro Honda1, Yo Ichikawa1 (1.Nagoya Inst.Tech.)

Keywords:Tin oxide, sputtering method, semiconductor thin film