The 79th JSAP Autumn Meeting, 2018

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6 Thin Films and Surfaces » 6.3 Oxide electronics

[21a-222-1~11] 6.3 Oxide electronics

Fri. Sep 21, 2018 9:00 AM - 12:00 PM 222 (222)

Hideyuki Okumura(Kyoto Univ.), Hiroshi Sakama(Sophia Univ.)

10:45 AM - 11:00 AM

[21a-222-7] Crystallization of a-ITO and a-IGZO thin films by post annealing

〇Shimpei Iwasaki1, Shingo Yamamoto1, Junjun Jia1, Toshihiro Okajima2, Yuzo Shigesato1 (1.Aoyama Gakuin Univ., 2.Kyushu Synchrotron Light Research Center (SAGA-LS))

Keywords:sputtering, synchrotron light, transparent conductive thin film