[21a-234B-1~9] 6.4 Thin films and New materials

[21a-234B-3] Thin film growth of Mn₃CuN onto a TiN buffer layer by Dynamic Aurora PLD

〇Jumpei Suzuki¹, Takahiko Kawaguchi¹, Naonori Sakamoto¹, Hisao Suzuki¹, Naoki Wakiya¹ (1.Shizuoka Univ.)

Keywords:PLD, thin film

Mn₃CuN exhibits giant magnetostriction up to 2000 ppm below 150 K. We have successfully grown Mn₃CuN thin films by Dynamic Aurora Pulsed Laser Deposition, which we have developed. However, the formation of impurities such as oxides is also observed, that is, we have not obtained Mn₃CuN single-phased thin films yet. A reaction of the thin film with oxygen in the substrate would be one of the reason for the oxide formation. Therefore, we purposed on the thin film growth of Mn₃CuN onto a TiN buffer layer to suppress the reaction.