[21a-234B-1~9] 6.4 Thin films and New materials

[21a-234B-5] Controlling crystal orientation of perovskite-type oxynitride CaTaO₂N thin film

〇Takuto Wakasugi¹, Shoichiro Nakao¹, Yasushi Hirose¹, Isao Harayama², Yuki Sugisawa², Junichi Kikuda², Daiichiro Sekiba², Hideyuki Tanaka³, Hiromu Kumagai³, Kazuhiko Maeda³, Tetsuya Hasegawa¹ (1.Univ. of Tokyo, 2.Univ. of Tsukuba, 3.Tokyo Tech)

Keywords:oxynitride, perovskite, thin film