[21a-235-1~8] 7.1 X-ray technologies

[21a-235-1] Fabrication and evaluation of high-spectral-flux laminar-type diffraction gratings overcoated with Lanthanum for Boron-K emission spectroscopic measurements

〇Tadashi Hatano¹, Masato Koike², Hiroaki Nishimura³, Alexander Pirozhkov², Masami Terauchi¹, Hiroyuki Sasai³, Tetsuya Nagano³ (1.IMRAM, Tohoku Univ., 2.QuBS, QST, 3.Device Dept., Shimadzu Corp.)

Keywords:diffraction grating, Boron, spectroscopic measurement

To meet with strong demands for the characterization of Boron at a single ppm level by soft X-ray emission grating spectrographs, we have been studying high diffraction efficiency gratings for B-K emission with transparent layer deposited on the surface. A Ni/La/C coated laminar-type grating has been fabricated and evaluated. Measured diffraction efficiency at B-K emission wavelength 6.76 nm was 37% at an angle of incidence of 84.2°. Enhancement of emission sensitivity by 5 times can be expected by high diffraction efficiency and low angle of incidence.