[21a-235-1~8] 7.1 X-ray technologies

[21a-235-2] Design Guidelines for Laminar-Type Diffraction Gratings Overcoated with Reflection Increasing Film for Boron-K Emission Spectroscopic Measurements

〇Masato Koike¹, Tadashi Hatano², Alexander Pirozhkov¹, Masami Terauchi², Hiroaki Nishihara³, Hiroyuki Sasai³, Tetsuya Nagano³ (1.QuBS, QST, 2.IMRAM, Tohoku Univ., 3.Device Dpt., Shimadzu Corp.)

Keywords:diffraction grating, soft X-ray, spectroscopic analysis

We describe optimum design guidelines for a method of depositing various reflection enhancement films on Ni diffraction grating surfaces to improve the diffraction efficiency of laminar diffraction grating at B-K emission (6.76 nm, 183 eV) based on experimental results of DLC, La films etc.by numerical calculation.