Optimum Sample Conditions of Polymer Blend films on Transmission EUV microscopy

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.1 X-ray technologies

Fri. Sep 21, 2018 10:00 AM - 12:00 PM 235 (3Ｆ_Lounge２)

Mitsunori Toyoda(Tokyo Polytechnic Univ.), Tadashi Hatano(Tohoku Univ.)

11:00 AM - 11:15 AM

〇(M1)Syunsuke Aizawa¹, Toshiyuki Kakudate¹, Shiori Gondai¹, Mitsunori Toyoda^1,2 (1.IMRAM, Tohoku Univ., 2.Tokyo Polytechnic Univ.)

Keywords:EUV microscopy, Polymer, Atomic scattering factor