[21a-CE-1~10] 13.5 デバイス／集積化技術

▼ [21a-CE-7] Steep Subthreshold Slope in Ferroelectric FET by Transient Negative Capacitance Effect with Polarization Switching Delay

〇(D)Chengji Jin¹、Takuya Saraya¹、Toshiro Hiramoto¹、Masaharu Kobayashi¹ (1.IIS, Univ. of Tokyo)

キーワード：Negative capacitance, FeFET, Steep slope

Transient behavior of FeFET is simulated based on time-delayed Preisach model calibrated by transient measurement of ferroelectric HfO₂. Transient NC effect caused by polarization switching delay results in sub-60 mV/dec SS with practical material, device and measurement parameters. The model provides a reasonable interpretation to the previously reported steep SS in NCFET.