Manufacture and evaluation of High-k/GeO<sub>2</sub>/Ge

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Fri. Sep 21, 2018 1:15 PM - 5:00 PM 145 (Reception Hall)

Keisuke Yamamoto(Kyushu Univ.), Yasushi Hotta(Univ. of Hyogo)

2:30 PM - 2:45 PM

〇Ryuichirou Watanabe¹, Kenichiro Toyoda¹, Syoutaro Wachi¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)

Keywords:semiconductor