The 79th JSAP Autumn Meeting, 2018

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[21p-145-1~14] 13.3 Insulator technology

Fri. Sep 21, 2018 1:15 PM - 5:00 PM 145 (Reception Hall)

Keisuke Yamamoto(Kyushu Univ.), Yasushi Hotta(Univ. of Hyogo)

3:15 PM - 3:30 PM

[21p-145-8] Verification of oxidation selectivity by chemical oxdation for metal Hf/Si structure

〇Hiroki Oba1, Yoshitaka Iwasaki1, Tomo Ueno1 (1.Tkoyo Univ. of Agri & Tech.)

Keywords:semiconductor