The 79th JSAP Autumn Meeting, 2018

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[21p-146-1~17] 15.4 III-V-group nitride crystals

Fri. Sep 21, 2018 1:30 PM - 6:00 PM 146 (Reception Hall)

Tsutomu Araki(Ritsumeikan Univ.), Narihito Okada(Yamaguchi Univ.)

4:00 PM - 4:15 PM

[21p-146-10] Morphological change of AlN film on sapphire by annealing

〇Shogo Motegi1,2, Yosuke Mogami1,2, Atsushi Osawa3, kazuo Osaki3, Yukitake Tanioka3, Atsushi Maeoka3, Masafumi Jo2, Noritoshi Maeda2, Hiroyuki Yaguchi1, Hideki Hirayama2 (1.Saitama Univ., 2.Riken, 3.SCREEN Co. Ltd.)

Keywords:DC Sputtering, Annealing