[21p-223-1~12] 7.2 Applications and technologies of electron beams

△ [21p-223-3] Energy analysis of fogging electrons by the same electric field

〇Hideya Mizuno¹, Shota Nishimura¹, Kento Kubo¹, Masatoshi Kotera¹ (1.Osaka Institute of Technology)

Keywords:Scanning electron microscope

Scanning electron microscopes are indispensable in the current scientific field as observation, analysis and evaluation equipment. However, when the conductivity of the sample is low, charging phenomenon occurs due to EB irradiation and stable observation or the like can not be performed. We have advocated that charging is formed not just under the beam but also outside the irradiation range by irradiation with fogging electrons (FGE). The energy of FGE can be investigated by unifying the electric field formed by WD and applied bias and comparing the surface potential distribution under each condition.