[21p-223-1~12] 7.2 Applications and technologies of electron beams

[21p-223-4] Specimen preparation method towards more reliable particle size distribution measurement by SEM/TEM

〇Akira Kurokawa¹, Kazuhiro Kumagai¹, Satoru Akai², Nobuo Handa², Yoshikazu Sasaki², Naoki Kikuchi², Shinichi Kitamura², Hironobu Manabe² (1.AIST, 2.JEOL)

Keywords:sample preperation, electron microscope, nanoparticle

The specimen preparation for the measurement of the nanoparticle size-distribution with SEM/TEM method has important role to derive the reliable results. We have developed the specimen preparation method in which a right sample for electron microscopic analysis can be made with nanoparticle-dispersed liquid. This method will reduce particle agglomeration and spread the particle with moderate interval on an EM membrane substrate.