The 79th JSAP Autumn Meeting, 2018

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[21p-232-1~18] 6.2 Carbon-based thin films

Fri. Sep 21, 2018 1:15 PM - 6:00 PM 232 (232)

Norio Tokuda(Kanazawa Univ.), Mariko Suzuki(CORNES Technologies Ltd.), Daisuke Takeuchi(AIST), Hisao Miyazaki(Toshiba)

1:30 PM - 1:45 PM

△ [21p-232-2] Reduction of dislocation density in diamond by hot-filament CVD growth accompanying metal incorporations and their improvement of SBD characteristics

〇Shinya Ohmagari1, Hideaki Yamada1, Nobuteru Tsubouchi1, Shingo Tanaka2, Akiyoshi Chayahara1, Hitoshi Umezawa1, Yoshiaki Mokuno1, Daisuke Takeuchi1 (1.AIST ADPERC, 2.AIST RIECEN)

Keywords:Diamond, Dislocation, Schottky barrier diode