[21p-234B-1~8] 6.4 Thin films and New materials

[21p-234B-2] Synthesis of Metal Oxide Films by Chelate Flame Method Using Metal-EDTA Complex and Metal-Acetylacetonate as Raw Materials

〇Taito Kikuchi¹, Atsushi Nakamura^2,1, Keiji Komatsu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Chubu Chelest Co., Ltd.)

Keywords:Metal-EDTA Complex, Metal-Acetylacetonate, Chelate Flame Method