The 79th JSAP Autumn Meeting, 2018

Presentation information

Poster presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[21p-PB1-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Fri. Sep 21, 2018 1:30 PM - 3:30 PM PB (Shirotori Hall)

1:30 PM - 3:30 PM

[21p-PB1-10] Evaluation of isocyanate group on CNTs formed by plasma treatmen

Kazuki Michiya1, Hideo Uchida1, Daisuke Ogawa1, Keiji Nakamura1 (1.Chubu Univ.)

Keywords:carbon nanotube, plasma