[21p-PB1-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[21p-PB1-14] Surface Treatment of Fluorocarbon Polymers using Elongated Large-Area Parallel Plate Electrode Type Dielectric Barrier Discharge

〇Kazuya Sugiyama¹, Akihisa Ogino¹, Masaaki Nagatsu^1,2 (1.Shizuoka univ., 2.Research Institute of Electronics, Shizuoka Univ.)

Keywords:plasma surface treatment, fluorocarbon polymers, large-area plasma