Satoshi Matsuno

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:45 PM - 6:15 PM F202 (61-202)

Oral presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[19p-F202-1~16] 13.2 Exploratory Materials, Physical Properties, Devices

4:30 PM - 4:45 PM

[19p-F202-11] Preparation of poly-crystalline BaSi₂ thin-films on Si substrate by helicon-wave plasma sputtering

〇Satoshi Matsuno¹, Ryota Takabe¹, Masami Mesuda², Hideto Kuramochi², Kaoru Toko¹, Takashi Suemasu¹ (1.Tsukuba Univ., 2.Tosoh corp.)