〇Nobuhiko Kokubo^1,2, Yosuke Tsunooka^1,2, Fumihiro Fujie¹, Junji Ohara¹, Shoichi Onda¹, Hisashi Yamada², Mitsuaki Shimizu², Shunta Harada¹, Miho Tagawa¹, Toru Ujihara^1,2 (1.Nagoya Univ., 2.AIST GaN-OIL)

〇Tomoyuki Tanikawa¹, Takehiro Yoshida², Takashi Matsuoka¹ (1.IMR, Tohoku Univ., 2.SCIOCS)

〇Takashi Nakano¹, Masaaki Araidai^3,2, Kenji Shiraishi^3,2, Atsushi Tanaka³, Yoshio Honda³, Hiroshi Amano³ (1.Nagoya Univ., 2.Graduate School of Engineering, Nagoya Univ., 3.IMaSS, Nagoya Univ.)

〇Jianbo Liang¹, Yan Zhou², Manikant Singh², Filip Gucmann², James Pomeroy², Martin Kuball², Naoteru Shigekawa¹ (1.Osaka City Univ., 2.Univ. of Bristol)

〇Yukio Kashima^1,3, Yasuhiro Watanabe², Tomohiko Shibata², Noritoshi Maeda¹, Eriko Matsuura^1,3, Takeshi Iwai⁴, Mitsunori Kokubo⁵, Takaharu Tashiro⁵, Kanji Furuta⁶, Ryuichiro Kamimura⁶, Yamato Osada⁶, Hideki Takagi⁷, Yuichi Kurashima⁷, Yasushi Iwaisako⁸, Tsugumi Nagano⁹, Hideki Hirayama¹ (1.RIKEN, 2.DOWA Electronics, 3.Marubun, 4.Tokyo Ohka Kogyo, 5.Toshiba machine, 6.ULVAC, 7.AIST, 8.Nippon Tungsten, 9.Dai Nippon Printing)

〇Muhammad Ajmal Khan¹, Takuma Matsumoto^1,2, Noritoshi Maeda¹, Masafumi Jo¹, Norihiko Kamata², Hideki Hirayama^1,2 (1.Hirosawa Wako, Saitama, 351-0198, Japan, 2.Saitama University, 255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan)

〇Yuta Kawase¹, Syunya Ikeda¹, jyunya hakamata¹, takafumi hayasi¹, syo Iwayama¹, Iwaya motoaki¹, takeuchi tetsuya¹, kamiyama satoshi¹, akasaki isamu^1,2 (1.Meijo Univ., 2.Nagoya Univ.)

〇(M2)Yasuto Akatsuka¹, Ryota Fuwa¹, Sho Iwayama¹, Tetsuya Takeuchi¹, Satoshi Kamiyama¹, Motoaki Iwaya¹, Isamu Akasaki^1,2 (1.Fac. Sci.&Eng. Meijo Univ., 2.Akasaki Research Center,Nagoya Univ.)

Kazunori Shibuya¹, Ayumu Yoneda¹, Yuki Hashiguchi¹, Hiroyuki Miyoshi¹, Satoshi Kurai¹, 〇Hideaki Murotani², Narihito Okada¹, Kazuyuki Tadatomo¹, Yoichi Yamada¹ (1.Yamaguchi Univ., 2.NIT, Tokuyama Coll.)

〇Megumi Sakata¹, Ushida Saki¹, Motoaki Iwaya¹, Satoshi Kamiyama¹, Tetsuya Takeuchi^1,2 (1.Meijo Univ., 2.Nagoya Univ.Akasaki Research Center)