[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-C101-7] Effect of Twin Generation on CLC (100) Crystal Growth

〇Nobuo Sasaki^1,2, Muhammad Arif², Yukiharu Uraoka² (1.Sasaki Consulting, 2.NAIST)

Keywords:LTPS, CLC

In CLC, it has been found that a (100) textured single crystalline Si film grows at the low irradiation power. But a domain having a (110) texture in the scanning direction and (111) texture in the transverse direction is sometimes observed at a higher power. This paper reports that twin boundaries are observed at the sites of the domains.