[17a-F202-1~11] 7.4 Buried interface sciences with quantum beam

[17a-F202-2] Improvement of XANAM for element map acquisition

〇Shushi Suzuki¹, Shingo Mukai², Wang-Jae Chun³, Masaharu Nomura⁴, Kiyotaka Asakura² (1.Nagoya Univ., 2.Hokkaido Univ., 3.ICU, 4.KEK-PF)

Keywords:NC-AFM, SR X-ray, Elemental analysis

To investigate elemental and chemical analysis on nano-structures at surfaces/interfaces, we developed X-ray aided noncontact atomic force microscopy (XANAM). We examined a method for elemental image acquisition more quickly and easily than the method based on force spectra used for principle confirmation and force component analysis. Using the Ni nanoparticles deposited on HOPG as a sample, we found that if fine modulation by X-rays can be caught, further improvement of the elemental map acquisition can be possible.