[17p-A404-1~14] 3.16 Optics and Photonics English Session

▲ [17p-A404-6] Substrate independent highly metallic TiN films fabricated by pulsed laser deposition method for plasmonic device applications

〇(P)Sugavaneshwar RamuPasupathi¹、Satoshi Ishii¹、Dao Thang Duy¹、Akihiko Ohi²、Toshihide Nabatame²、Tadaaki Nagao^1,3 (1.MANA, NIMS、2.NFG,NIMS、3.DCMP, Hokkaido Univ)

キーワード：plasmonics, titanium nitride, flexible device