[17p-B201-1~7] pMAIRS: A cutting-edge technique revealing the molecular orientation even in an amorphous thin film having a surface roughness

[17p-B201-2] Analysis of Chain Orientation Behavior in Aromatic Polyimide Films by Variable Temperature pMAIRS Method

〇Shinji Ando¹, kazuyuki Tanaka¹, Ryohei Ishige¹ (1.Tokyo Inst. Technol.)

Keywords:variable-temperature p-MAIRS, polyimide, Molecular orientation behavior

A variable-temperature p-polarized multiple-angle incidence resolution spectroscopy (VT pMAIRS) technique was developed that enables the in situ analysis of the evolution of molecular orientation in polymer thin films induced by a wide range of temperature changes involving phase transition and chemical reaction. This technique was used to analyze variations in chain orientation during the thermal curing of thin films (<300 nm) composed of various aromatic polyimides (PIs) formed on Si substrates. The orientation mechanisms in these thin films are found to be significantly different from those of the corresponding thick films because of lower levels of residual solvent and low shrinkage during solvent evaporation and thermal imidization.