The 65h JSAP Spring Meeting, 2018

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[17p-C103-1~13] 6.4 Thin films and New materials

Sat. Mar 17, 2018 1:45 PM - 6:00 PM C103 (52-103)

Yoshinobu Nakamura(Univ. of Tokyo), Motofumi Suzuki(Kyoto Univ)

2:30 PM - 3:00 PM

[17p-C103-2] [INVITED] Fabrication of micro devices based on functional thin films

〇Takayuki Harada1, Carsten Woltmann2, Pascal Wittlich2, Jochen Mannhart2, Atsushi Tsukazaki1 (1.Tohoku Univ., 2.Max Planck Inst.)

Keywords:Thin films, Devices, Oxides