[17p-C201-1~19] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

[17p-C201-3] Study of particle removal useing microplasma electrode

〇Daisuke Nonaka¹, Jaroslav Kristof¹, Marius Blajan¹, Kazuo Shimizu¹ (1.Shizuoka Univ.)

Keywords:microplasma, particle removal, plasma actuator

Particulate control is attracting attention also in semiconductor manufacturing and indoor environments including particle structure control, flow control, particle synthesis, and the like. In the case of using plasma, the generation of fine particles by gas phase reaction and electric dust collection are mentioned. In this research, experimental investigation was carried out with the aim of removing fine particles on the electrode surface using a microplasma actuator type electrode.