[17p-C202-1~15] 17.2 Graphene

[17p-C202-3] Direct growth of graphene on r-plane sapphire by LPCVD
--- Dependence of 3-Hexyne partial pressure ---

〇Yuki Ueda¹, Jumpei Yamada¹, Kyosuke Fujiwara¹, Daichi Yamamoto¹, Takahiro Maruyama¹, Shigeya Naritsuka¹ (1.Meijo Univ.)

Keywords:graphene, direct growth, CVD