[17p-C204-1~20] 8.1 Plasma production and diagnostics

△ [17p-C204-10] Limiting factor of the generation of electronegative oxygen ions with after-arc plasma using global model

〇Hisashi Kitami^1,2, Junichi Nomoto², Toshiyuki Sakemi¹, Hisaso Makino^2,3, Yasushi Aoki¹, Tetsuya Yamamoto² (1.Sumitomo Heavy Industries, Ltd., 2.Research Inst., Kochi Univ. Tech., 3.Kochi Univ. Tech.)

Keywords:electronegative oxigen ions, arc discharge, reactive plasma