The 65h JSAP Spring Meeting, 2018

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Symposium (Oral)

Symposium » A new era of defect research starting with field fusion

[17p-C302-1~7] A new era of defect research starting with field fusion

Sat. Mar 17, 2018 1:45 PM - 5:30 PM C302 (52-302)

Kentaro Kutsukake(Nagoya Univ.), Yutaka Ohno(Tohoku Univ.)

1:45 PM - 2:15 PM

[17p-C302-1] Growth of Defect-free Crystal and The effect of Impurities to phenomena

〇Wataru Sugimura1, Toshiaki Ono1, Masataka Hourai1 (1.SUMCO Corp.)

Keywords:sulicon, impurities, defect

To grow defect-free crystals, it is important to understand the defect formation behavior in silicon. Firstly, we explain the principle that the silicon crystal to be grown becomes defect free, and then mention the influence of impurities to the defect formation in silicon.