[17p-C303-1~14] 17.1 Carbon nanotubes & other nanocarbon materials

[17p-C303-6] Low temperature growth of SWCNT from Co catalyst using Al₂O₃ buffer layer

〇(M1)Takuya Okada¹, Seigo Ogawa¹, Takayuki Fujii¹, Takahiro Saida¹, Takahiro Maruyama¹ (1.Meijo Univ.)

Keywords:carbonnanotube

Since single-walled carbon nanotubes (SWCNTs) have various excellent electrical characteristics, they are expected to be applied to the electronics field.However, to realize that, it is a problem to lower the production temperature.In this study, in order to improve the growth amount of SWCNT from Co catalyst in low temperature growth, investigating the effect of growth temperature and ethanol pressure on growth amount when Al₂O₃ buffer layer is introduced, It shows the measurement result when changing to 700 ℃, and discusses the growth amount and the change of the structure of SWCNT.