The 65h JSAP Spring Meeting, 2018

Presentation information

Oral presentation

12 Organic Molecules and Bioelectronics » 12.4 Organic light-emitting devices and organic transistors

[17p-D102-1~19] 12.4 Organic light-emitting devices and organic transistors

Sat. Mar 17, 2018 1:15 PM - 6:30 PM D102 (56-102)

Takayuki Uchida(Tokyo Polytechnic Univ.), Yoshiyuki Suzuri(Yamagata Univ.), Noriyuki Takada(AIST)

5:30 PM - 5:45 PM

[17p-D102-16] Sputter-deposition of Al top electrode films of OLED under an infrared irradiation

Youichi Hoshi1, Yoji Yasuda1, Shin-ichi Kobayashi1, Takayuki Uchida1 (1.Tokyo Polytechnic Univ.)

Keywords:organic light emitting device, sputter-deposition, infrared irradiation

Sputter-deposition of Al top electrode films of OLED under an infrared irradiation was attempted by using a Facing Target type low damage sputtering system. As a result, it was found that the luminance characteristics of the OLED depend on the infrared irradiation conditions and the OLED fabricated by the sputtering method has almost similar operating characteristics of the OLED fabricated by evaporation method if the infrared irradiation conditions were optimized. These results indicates that the sputter-deposition process of top electrode film is useful for the fabrication of OLED.