[17p-F306-1~7] 12.7 Biomedical Engineering and Biochips

[17p-F306-5] Evaluation method of the spatial resolution of ion image sensor

〇Takeshi Araki¹ (1.Toyohashi Tech.)

Keywords:ion image sensor, spatial resolution

The spatial resolution of ion image sensor has not been measured due to the difficulty of controlling microscale pH changes in solution.It is evaluated by the pixel pitch.In this study, we propose an evaluation method of the spatial resolution of ion image sensor.Measurement results of 23.55µm and 2µm sensor showed that the spatial resolution is 10.62 lp/mm and 142.86 lp/mm, respectively.