[17p-F306-1~7] 12.7 Biomedical Engineering and Biochips

[17p-F306-7] Elastomer-based optical interferometric biosensor with open-cavity structure for drift suppression

〇Reina Teramoto¹, Satoshi Maruyama¹, Isao Takahashi², Shinji Takeoka², Toshinori Fujie^2,3, Kazuaki Sawada¹, Kazuhiro Takahashi^1,3 (1.Toyohashi Univ., 2.Waseda Univ., 3.JST PRESTO)

Keywords:bio sensor, MEMS

Detection method of biomarkers in blood or urine derived from disease is expected for simple, rapid, and inexpensive diagnosis. In particular, a semiconductor-based biosensor with large-scale sensor array provides multi-biomarker detection on a single chip. We have previously developed a MEMS optical interferometric surface stress sensor using an elastomer nanometer-thick sheet (polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer) with Young’s modulus of 59 MPa for sensing area. However, the elastomer-based surface-stress sensor imposed gas leakage from the sealed microcavity to solution, resulting in membrane drift by pressure change in the Fably-Perot (FP)-cavity. To solve this problem, we propose an open-cavity structure of an elastomer-based optical interferometric biosensor which employs a FP-cavity under an SBS nanosheet connecting to backside air through a substrate via hole. As a result of measurement in anti-bovine serum albumin antibody solution, the membrane drift was suppressed, and the responsiveness of the membrane by molecular adsorption onto the membrane was improved by two orders of magnitude compared with the conventional paryelen-C-based sensor.