The 65h JSAP Spring Meeting, 2018

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1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.1 Interdisciplinary and General Physics

[17p-P1-1~12] 1.1 Interdisciplinary and General Physics

Sat. Mar 17, 2018 1:30 PM - 3:30 PM P1 (P)

1:30 PM - 3:30 PM

[17p-P1-7] Surface roughness dependency of optical properties of textured SiC thin films

〇Yuki Kawamura1, Yuzuru Narita1, Atsushi Saito1, Kensuke Nakajima1, Maki Suemitsu2 (1.Yamagata Univ., 2.RIEC,Tohoku Univ.)

Keywords:silicon carbide, Surface roughness, optical property