[17p-P11-1~37] 12.7 Biomedical Engineering and Biochips

[17p-P11-4] Research on Si Optical Biosensors with Anti-Reflective Coatings

〇Jun Maeda^1,2, Yuuto Nakashima^1,2, Riku Funamoto¹, Yoshiteru Amemiya¹, Takeshi Ikeda^3,1, Akio Kuroda^3,1, Shin Yokoyama^1,2 (1.Res. Inst. for Nanodevice and Bio Systems, Hiroshima Univ., 2.Dept. of Semiconductor Electronics and Integration Science, AdSM Hiroshima Univ., 3.Dept. of Molecular Biotechnology , AdSM Hiroshima Univ.)

Keywords:biosensor, anti-reflective coatings