[17p-P11-1~37] 12.7 Biomedical Engineering and Biochips

▲ [17p-P11-8] Development of 3D-Stacked Multi-Shank Si Neural Probe Array (1) - Fabrication of Embedded Multiple Optical Fibers in Multi-Shank -

〇Bowen Zhang¹, Takuya Harashima¹, Takumi Morikawa¹, Chidai Shima¹, Hisashi Kino², Takafumi Fukushima¹, Tetsu Tanaka^1,3 (1.Grad. Sch. of Eng., Tohoku Univ., 2.FRIS, Tohoku Univ., 3.Grad. Sch. of Biomedical Eng., Tohoku Univ.)

Keywords:Neural probe, Optogenetics