4:00 PM - 6:00 PM
[17p-P12-4] GaN surface treatment of TMAH with varying dilution solvent
Keywords:GaN, TMAH, surface treatment
Poster presentation
13 Semiconductors » 13.7 Compound and power electron devices and process technology
Sat. Mar 17, 2018 4:00 PM - 6:00 PM P12 (P)
4:00 PM - 6:00 PM
Keywords:GaN, TMAH, surface treatment