4:00 PM - 6:00 PM
△ [17p-P12-7] Physical and Electrical Properties of SiO2 Film Annealed by High Pressure Water Vapor
Keywords:High Pressure Water Vapor Annealing, GaN
Poster presentation
13 Semiconductors » 13.7 Compound and power electron devices and process technology
Sat. Mar 17, 2018 4:00 PM - 6:00 PM P12 (P)
4:00 PM - 6:00 PM
Keywords:High Pressure Water Vapor Annealing, GaN