Characterization of the thin oxide film on GaN by X-ray reflectivity and spectroscopic methods

Presentation information

Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering

Sat. Mar 17, 2018 1:30 PM - 3:30 PM P2 (P)

1:30 PM - 3:30 PM

〇Yusaku Tanahashi¹, Ryoichi Kumazawa¹, Shingo Ogawa¹, Asami Yasui¹, Yuichi Muraji¹, Hirofumi Seki¹ (1.Toray Research Center, Inc.)

Keywords:X-ray reflectivity, GaN, Oxide thin film