DC sensitivity of VOx microbolometer fabricated by MOD on Si3N4/SiO2 membrane

Presentation information

Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering

Sat. Mar 17, 2018 1:30 PM - 3:30 PM P2 (P)

1:30 PM - 3:30 PM

〇(M2)Kohei Maeda¹, Hai Van Nhu¹, Kunio Nishioka², Akihiro Matsutani², Takashi Tachiki¹, Takashi Uchida¹ (1.National Defence Academy, 2.Tokyo Tech)

Keywords:bolometer, membrane, MOD