[17p-P3-1~22] 3.13 Semiconductor optical devices

[17p-P3-17] Swept quantum cascade laser with MEMS grating

〇Atsushi Sugiyama¹, Naota Akikusa¹, Tadataka Edamura¹ (1.hamamatsu photonics)

Keywords:MEMS gratings, quantum cascade lasers, swept lasers

The MEMS grating, with a mirror diameter of 5 mm, is fabricated for mid infrared swept lasers. It consists of a Cu damascene coil for the magnetic actuator and a nano-imprinted braze grating. A resonant frequency reaches 1795 Hz. Despite a large mirror, a mechanical scanning angle of 8.7 deg is measured. Using a MEMS grating, a high speed and broadband tuning from 8.3 micron to 10 micron is demonstrated with an external-cavity quantum cascade laser.