[17p-P8-1~24] 13.5 Semiconductor devices and related technologies

△ [17p-P8-13] Effects of Current Density on Mechanical Properties of Electroplated Nickel with High Speed Sulfamate Bath

〇Takahiro Yamamoto¹, Kengo Igawa¹, Chen Chun-Yi¹, Chang Tso-Fu Mark¹, Takashi Nagoshi², Osamu Kudo³, Ryu Maeda⁴ (1.Tokyo Tech., 2.AIST, 3.Alphaseiko, 4.Synapse)

Keywords:Sulfamic acid nickel plating, Current density, Micro Compression Test