[18a-A402-1~11] 3.12 Nanoscale optical science and near-field optics

[18a-A402-8] Fabrication of metallic and dielectric zirconium nitride for plasmonic applications

〇Satoshi Ishii¹, Tadaaki Nagao^1,2 (1.NIMS, 2.Hokkaido Univ.)

Keywords:plasmonics, transition metal nitride, hot carrier

We demonstrate that by controlling the flow rate of argon and nitrogen during the DC sputtering of zirconium, zirconium nitride can be either metallic or dielectric. Our results show that the fabrication of plasmonic structures and hot carrier engineering can be done from a single target.