11:45 AM - 12:00 PM
△ [18a-B301-11] Improvement of retention characteristics utilizing Hf-based MONOS nonvolatile memory
Keywords:nonvolatile memory, Hf, retention characteristics
The memory characteristics of diodes and MISFETs with Hf-based MONOS gate stack structure were investigated in our previous reports. In this report, the retention characteristics of Hf-based MONOS nonvolatile memory were investigated.