2018年第65回応用物理学会春季学術講演会

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6 薄膜・表面 » 6.3 酸化物エレクトロニクス

[18a-C102-1~11] 6.3 酸化物エレクトロニクス

2018年3月18日(日) 09:00 〜 12:00 C102 (52-102)

廣瀬 靖(東大)

09:15 〜 09:30

[18a-C102-2] Study of Photocatalytic Reaction with Oxygen Molecules in the Nano-rods ZnO Film Prepared by Hydrothermal Growth

〇(D)Suchada Worasawat1,3、Katsuyoshi Tasaki2,3、Yoichiro Neo3、Yoshinori Hatanaka3、Hidenori Mimura3 (1.GSST, Shizuoka Univ.、2.GSIST, Shizuoka Univ.、3.RIE, Shizuoka Univ.)

キーワード:ZnO nano-rods, Photoccatalytic, Phoconductivity

We demonstrate enhanced persistent ultraviolet (UV) photoconductivity of ZnO nanorods (NRs) array by post-treatment at various temperature. Well-aligned ZnO NRs arrays were obtained by two steps growth, seeding by RF magnetron sputtering and nano-rods growth by hydrothermal method. After growth process, the samples were annealed from 150 ºC to 450 ºC. The FE-SEM observation showed decreasing size and arising nano-holes in the samples annealed at 450 ºC. The X-ray deflection (XRD) shows a (002) orientation for all samples, corresponding to ZnO hexagonal wurtzite structure. Showing a remarkable improvement of crystallinity in ZnO NRs. The photoconductivity of ZnO NRs was observed under vacuum and the oxygen atmosphere. The photoconductivity was increased with increasing the annealing temperature. In the function of oxygen atmosphere variation, the photoconductivity was decreased with increasing of oxygen pressure, the number of oxygen molecules in the system plays an important role to control the photoconductivity due to oxygen molecules assisted electron-hole pairs in the recombination process