11:15 〜 11:30
▼ [18a-C102-9] Control of TiO2 thin film density and mechanical properties by laser radiation.
キーワード：tio2, laser, solar cells
In this study, the effects of laser radiation were investigated on the TiO2 thin density and mechanical properties.
TiO2 thin films were prepared by the spray deposition technique on glass substrates and ITO/PEN substrates.
Samples were modified by a direct laser write technique without prior annealing in the furnace. In this study we have used 1064 nm pulsed nanosecond Nd:YAG laser with pulse duration of 6 ns and continuous wave UV 405 nm laser diode. Adhesion to the glass substrate was tested by sonication with 120 W power at 38 kHz in water for 1, 3 and 5 min. Samples on the flexible substrate where tested by bending. Raman spectroscopy was used to determine a polymorph phase change.
Laser irradiation leads to the densification of TiO2 nanoparticles without a change of the polymorph phase according to the Raman spectroscopy results. Moreover, the densified TiO2 thin film has higher mechanical hardness and higher adhesion to the substrate than the pristine TiO2 thin film.
TiO2 thin films were prepared by the spray deposition technique on glass substrates and ITO/PEN substrates.
Samples were modified by a direct laser write technique without prior annealing in the furnace. In this study we have used 1064 nm pulsed nanosecond Nd:YAG laser with pulse duration of 6 ns and continuous wave UV 405 nm laser diode. Adhesion to the glass substrate was tested by sonication with 120 W power at 38 kHz in water for 1, 3 and 5 min. Samples on the flexible substrate where tested by bending. Raman spectroscopy was used to determine a polymorph phase change.
Laser irradiation leads to the densification of TiO2 nanoparticles without a change of the polymorph phase according to the Raman spectroscopy results. Moreover, the densified TiO2 thin film has higher mechanical hardness and higher adhesion to the substrate than the pristine TiO2 thin film.