[18a-D103-1~10] 15.7 結晶評価，不純物・結晶欠陥

▲ [18a-D103-1] Numerical simulation of crystal rotation effect on the solid-liquid interface in the floating-zone (FZ) silicon

〇(P)Xuefeng Han¹、Satoshi Nakano¹、Xin Liu¹、Hirofumi Harada¹、Yoshiji Miyamura¹、Koichi Kakimoto¹ (1.RIAM, Kyushu Univ.)

キーワード：floating zone silicon, numerical simulation

Single crystal silicon with high purity can be produced by FZ method. Without contamination by the crucible, the oxygen concentration in the FZ silicon is low. The striations in the as-grown crystal are caused by the asymmetric electromagnetic (EM) field due to the EM supplier [1]. A. Mühlbauer conducted 2D calculation and compared with experimental results. The discrepancy between calculation and experiment qualitatively shows influence of the asymmetric electromagnetic field on the radial resistivity distribution [2]. To investigate the asymmetric electromagnetic field on the interface, a three dimensional global model has been developed based on the open-source library OpenFOAM. In the numerical simulation, the effect of EM force on the melt flow is considered. The 3D melt flows at free surface under different rotation speeds have been obtained (Figure 1). The interface deflections caused by EM supplier under different rotation speeds are calculated. The calculation results (Figure 2) show that high rotation speed could decrease the deflection of interface caused by the EM supplier.
Reference
[1] A. Mühlbauer, A. Muiznieks, J. Virbulis, A. Lüdge, and H. Riemann, J. Cryst. Growth 151, 66-79 (1995)
[2] A. Mühlbauer, A. Muiznieks, G. Raming, H. Riemann, and A. Lüdge, J. Cryst. Growth 198, 107-113 (1999).
Acknowledgement
This work was partly supported by the New Energy and Industrial Technology Development Organization (NEDO) under the Ministry of Economy, Trade and Industry (METI).